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Hydrogen penetration into silicon during wet-chemical etching

✍ Scribed by J Weber; S Knack; O.V Feklisova; N.A Yarykin; E.B Yakimov


Book ID
108411259
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
131 KB
Volume
66
Category
Article
ISSN
0167-9317

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