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Transformation of deep-level spectrum of irradiated silicon due to hydrogenation under wet chemical etching

✍ Scribed by Feklisova, Olga V; Yarykin, Nikolai A


Book ID
115502140
Publisher
Institute of Physics
Year
1997
Tongue
English
Weight
146 KB
Volume
12
Category
Article
ISSN
0268-1242

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