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Hydrogen induced positive charging of buried SiO2

✍ Scribed by K. Vanheusden; A. Stesmans

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 319 KB
Volume: 22
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(93)90190-g

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