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Mechanism of positive charge generation in the bulk of HfAlO/SiO2 stack

✍ Scribed by Piyas Samanta; Chin-Lung Cheng; Yao-Jen Lee; Mansun Chan


Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
559 KB
Volume
86
Category
Article
ISSN
0167-9317

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✦ Synopsis


We have investigated electrical stress-induced positive charge buildup in a hafnium aluminate (HfAlO)/ silicon dioxide (SiO 2 ) dielectric stack (equivalent oxide thickness = 2.63 nm) in metal-oxide-semiconductor (MOS) capacitor structures with negative bias on the TaN gate. Various mechanisms of positive charge generation in the dielectric have been theoretically studied. Although, anode hole injection (AHI) and valence band hole tunneling are energetically favorable in the stress voltage range studied, the measurement results can be best explained by the dispersive proton transport model.


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