Relation between hole traps and non-reactive hydrogen-induced positive charges

✍ Scribed by J.F Zhang; C.Z Zhao; G Groeseneken; R Degraeve; J.N Ellis; C.D Beech

• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 126 KB
• Volume: 59
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(01)00649-9

✦ Synopsis

There are at least two ways of creating positive charges in the oxide: hole trapping and the formation of positive hydrogenous species. This paper investigates the relation between these two methods. The issues addressed include whether hole traps assist in the generation of hydrogenous positive charges and how the formation of hydrogenous charges affects the hole trapping.