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Hydrogen effect on solid phase epitaxy of Si on Si (0 0 1) surface

✍ Scribed by Masataka Hasegawa; Yasunori Tanaka; Naoto Kobayashi

Book ID: 114169615
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 468 KB
Volume: 136-138
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(97)00681-2

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