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Hydrocarbon impurities in SiF4and SiH4prepared from it

✍ Scribed by A. D. Bulanov; P. G. Sennikov; V. A. Krylov; T. G. Sorochkina; L. A. Chuprov; O. Yu. Chernova; O. Yu. Troshin

Book ID: 110165924
Publisher: SP MAIK Nauka/Interperiodica
Year: 2007
Tongue: English
Weight: 151 KB
Volume: 43
Category: Article
ISSN: 0020-1685
DOI: 10.1134/s0020168507040061

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