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Hydrocarbon-based etching of InP

✍ Scribed by Th. Allinger; J.A. Schaefer

Book ID: 103617072
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 432 KB
Volume: 65-66
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(93)90728-t

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