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Oxide-free etching of (100) InP surfaces

โœ Scribed by A. Knauer; D. Hirsch; R. Staske; U. Zeimer


Publisher
John Wiley and Sons
Year
1989
Tongue
English
Weight
547 KB
Volume
24
Category
Article
ISSN
0232-1300

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Angular and velocity distributions of desorbing products from UV laser-induced etching of InP( 100) surface with a supersonic chlorine molecular beam have been measured with a rotatable quadrupole mass spectrometer. Pulsed laser irradiation at 355 nm produced InCl angular distributions can be fit by