Hot-Wire Chemical Vapor Deposition of Chalcogenide Materials for Phase Change Memory Applications

✍ Scribed by Abrutis, Adulfas; Plausinaitiene, Valentina; Skapas, Martynas; Wiemer, Claudia; Salicio, Olivier; Pirovano, Agostino; Varesi, Enrico; Rushworth, Simon; Gawelda, Wojciech; Siegel, Jan

• Book ID: 120379596
• Publisher: American Chemical Society
• Year: 2008
• Tongue: English
• Weight: 422 KB
• Volume: 20
• Category: Article
• ISSN: 0897-4756
• DOI: 10.1021/cm8004584