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Chemical vapor deposition of chalcogenide materials for phase-change memories

โœ Scribed by A. Abrutis; V. Plausinaitiene; M. Skapas; C. Wiemer; O. Salicio; M. Longo; A. Pirovano; J. Siegel; W. Gawelda; S. Rushworth; C. Giesen


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
438 KB
Volume
85
Category
Article
ISSN
0167-9317

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