Mass spectrometric study of gas-phase chemistry in a hot-wire chemical vapor deposition reactor with tetramethylsilane

✍ Scribed by X.M. Li; B.D. Eustergerling; Y.J. Shi

• Book ID: 108146538
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 469 KB
• Volume: 263
• Category: Article
• ISSN: 1387-3806
• DOI: 10.1016/j.ijms.2007.02.051