✦ LIBER ✦
Application of laser induced electron impact ionization to the deposition chemistry in the hot-wire chemical vapor deposition process with SiH4-NH3gas mixtures
✍ Scribed by Brett Eustergerling; Martin Hèden; Yujun Shi
- Book ID
- 108158414
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 318 KB
- Volume
- 18
- Category
- Article
- ISSN
- 1044-0305
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