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Hot-implantation of nitrogen donors into p- type α-SiC and characterization of n+-p junction

✍ Scribed by N. Inoue; A. Itoh; T. Kimoto; H. Matsunami; T. Nakata; M. Inoue


Book ID
107457521
Publisher
Springer US
Year
1997
Tongue
English
Weight
681 KB
Volume
26
Category
Article
ISSN
0361-5235

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