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Homogeneous chemical etching of sand-blasted silicon substrates

✍ Scribed by M. Vergnat; N.Hadj Zoubir; A. Burneau

Book ID: 107864358
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 271 KB
Volume: 255
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(94)05660-6

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