Homogeneous and heterogeneous reactions in the decomposition of precursors for the MOCVD of high-k and ferroelectric films

✍ Scribed by G.G. Condorelli; A. Baeri; I.L. Fragalà; V. Lauretta; G. Smerlo

• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 249 KB
• Volume: 5
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/s1369-8001(02)00094-x