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Hollow cathode deposition of silicon dioxide films

✍ Scribed by M. Gross; S.O. Kong; C.M. Horwitz; C.Y. Kwok

Book ID: 114085792
Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 408 KB
Volume: 193-194
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(05)80021-5

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