High-temperature single-crystal 3C-SiC capacitive pressure sensor

✍ Scribed by Young, D.J.; Jiangang Du; Zorman, C.A.; Ko, W.H.

• Book ID: 118186885
• Publisher: IEEE
• Year: 2004
• Tongue: English
• Weight: 611 KB
• Volume: 4
• Category: Article
• ISSN: 1530-437X
• DOI: 10.1109/jsen.2004.830301