High Temperature 10 Bar Pressure Sensor Based on 3C-SiC/SOI for Turbine Control Applications

✍ Scribed by Zappe, S.; Franklin, J.; Obermeier, E.; Eickhoff, M.; Möller, H.; Krötz, G.; Rougeot, C.; Lefort, O.; Stoemenos, J.

• Book ID: 127321266
• Publisher: Trans Tech Publications, Ltd.
• Year: 2001
• Tongue: English
• Weight: 326 KB
• Volume: 353-356
• Category: Article
• ISSN: 1662-9752
• DOI: 10.4028/www.scientific.net/msf.353-356.753