A High-Temperature Highly Sensitive Capacitive Pressure-Pulsation Sensor
β Scribed by A. A. Kazaryan
- Book ID
- 111599181
- Publisher
- Springer US
- Year
- 2003
- Tongue
- English
- Weight
- 111 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0543-1972
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π SIMILAR VOLUMES
This paper describes the design and fabrication of a capacitive pressure sensor that has a large capacitance signal and a high sensitivity of 76 pF/bar in touch mode operation. Due to the large signal, problems with parasitic capacitances are avoided and hence it is possible to integrate the sensor
## Abstract A new pressure sensor based on fiber Bragg gratings (FBG), is described with highβpressure sensitivity. The sensor is configured by embedding the FBG in a polymerβfield aluminum casing with an opening on one side, which is exposed to pressure measurand. The measured pressure response is