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High-temperature piezoresistive pressure sensor based on implantation of oxygen into silicon wafer

โœ Scribed by Xin Li; Qin Liu; Shixin Pang; Kaixian Xu; Hui Tang; Chensong Sun


Book ID
113905176
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
975 KB
Volume
179
Category
Article
ISSN
0924-4247

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