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‘SIMOX’ (Separation by Ion Implantation of Oxygen): a Technology for high-temperature silicon sensors

✍ Scribed by B. Diem; R. Truche; S. Viollet-Bosson; G. Delapierre


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
444 KB
Volume
23
Category
Article
ISSN
0924-4247

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