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High-temperature phosphorus ion doping of silicon

✍ Scribed by G.A. Kachurin; I.E. Tyschenko; A.P. Mazhirin; E. Wieser

Book ID: 113279856
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 426 KB
Volume: 43
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(89)90403-5

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