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High strain embedded-SiGe via low temperature reduced pressure chemical vapor deposition

โœ Scribed by Hong He; Paul Brabant; Keith Chung; Manabu Shinriki; Thomas Adam; Alexander Reznicek; Devendra Sadana; Satoshi Hasaka; Terry Francis


Book ID
113937367
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
856 KB
Volume
520
Category
Article
ISSN
0040-6090

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