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Deposition of High Purity Parylene- F Using Low Pressure Low Temperature Chemical Vapor Deposition

โœ Scribed by P. K. Wu; G. -R. Yang; L. You; D. Mathur; A. Cocoziello; C. -I. Lang; J. A. Moore; T. -M. Lu; H. Bakru


Book ID
107457619
Publisher
Springer US
Year
1997
Tongue
English
Weight
524 KB
Volume
26
Category
Article
ISSN
0361-5235

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