✦ LIBER ✦
Reduced Pressure-Chemical Vapor Deposition of High Quality Ge Layers on SiGe/Si Superlayers for Microelectronics and Optoelectronics Purposes
✍ Scribed by Chen, D.; Xue, Z.; Liu, S.; Zhang, M.
- Book ID
- 118010527
- Publisher
- The Electrochemical Society
- Year
- 2012
- Tongue
- English
- Weight
- 667 KB
- Volume
- 45
- Category
- Article
- ISSN
- 1938-6737
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