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High-speed noncontact profiler based on scanning white-light interferometry

✍ Scribed by Deck, Leslie ;de Groot, Peter

Book ID: 115343755
Publisher: The Optical Society
Year: 1994
Tongue: English
Weight: 635 KB
Volume: 33
Category: Article
ISSN: 1559-128X
DOI: 10.1364/AO.33.007334

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