✦ LIBER ✦
High speed volumetric thickness profile measurement based on full-field wavelength scanning interferometer
✍ Scribed by You, Jang-Woo; Kim, Soohyun; Kim, Daesuk
- Book ID
- 115410332
- Publisher
- Optical Society of America
- Year
- 2008
- Tongue
- English
- Weight
- 682 KB
- Volume
- 16
- Category
- Article
- ISSN
- 1094-4087
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