✦ LIBER ✦
Fast surface profiler by white-light interferometry by use of a new algorithm based on sampling theory
✍ Scribed by Hirabayashi, Akira ;Ogawa, Hidemitsu ;Kitagawa, Katsuichi
- Book ID
- 115350198
- Publisher
- The Optical Society
- Year
- 2002
- Tongue
- English
- Weight
- 420 KB
- Volume
- 41
- Category
- Article
- ISSN
- 1559-128X
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