✦ LIBER ✦
High-speed non-contact profiler based on scanning white light interferometry
✍ Scribed by L. Deck; P. de Groot
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 221 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0890-6955
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✦ Synopsis
We describe a new profiler for fast 3-dimensional measurements of both optically smooth and optically rough surfaces based on scanning white light techniques. The profiler utilizes all efficient algorithm to extract and save only the region of interference, substantially reducing both the acquisition and analysis time while measuring rougher surfaces and larger step heights tbax~ conventional phase shifting techniques. The iustrument measures steps to 100 microns, scal~s a 10 micron range in 5 seconds and has a smooth surface repeatability of 0.Snm.