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High-speed, high-quality crystal growth of 4H-SiC by high-temperature gas source method

✍ Scribed by Hoshino, Norihiro; Kamata, Isaho; Tokuda, Yuichiro; Makino, Emi; Sugiyama, Naohiro; Kojima, Jun; Tsuchida, Hidekazu

Book ID: 127219204
Publisher: Institute of Pure and Applied Physics
Year: 2014
Tongue: English
Weight: 721 KB
Volume: 7
Category: Article
ISSN: 1882-0778
DOI: 10.7567/apex.7.065502

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