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High resolution variable-shaped beam direct write

✍ Scribed by Peter Hahmann; Lutz Bettin; Monika Boettcher; Ulrich Denker; Thomas Elster; Steffen Jahr; Ulf-Carsten Kirschstein; Karl-Heinz Kliem; Bernd Schnabel

Book ID: 108207704
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 657 KB
Volume: 84
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2007.01.049

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