𝔖 Bobbio Scriptorium

✦ LIBER ✦

High resolution ion beam lithography: N P Economou et al, J Vac Sci Technol, 19 (4), 1981, 1172–1175

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 153 KB
Volume: 35
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(85)90484-1

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