𝔖 Bobbio Scriptorium

✦ LIBER ✦

A mass-separating focused-ion-beam system for maskless ion implantation: V Wang et al, J Vac Sci Technol, 19 (4), 1981, 1158–1163

Publisher: Elsevier Science
Year: 1983
Tongue: English
Weight: 180 KB
Volume: 33
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(83)90764-9

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