✦ LIBER ✦
Design of an electrostatic ion optical system for microfabrication with 100 Å resolution: H Ohiwa et al,J Vac Sci Technol, 19 (4), 1981, 1074–1076
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 170 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0042-207X
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