✦ LIBER ✦
Masked ion-beam litography: A feasibility demonstration for submicrometer device fabrication: J L Bartelt et al,J Vac Sci Technol, 19 (4), 1981, 1166–1171
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 175 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0042-207X
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