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High performance self-aligned top-gate ZnO thin film transistors using sputtered Al2O3 gate dielectric

✍ Scribed by Rongsheng Chen; Wei Zhou; Meng Zhang; Hoi Sing Kwok

Book ID: 116943630
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 425 KB
Volume: 520
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2012.06.066

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