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High-Performance Metal–Insulator–Metal Capacitors Using Europium Oxide as Dielectric

✍ Scribed by Padmanabhan, R.; Bhat, N.; Mohan, S.

Book ID
114620936
Publisher
IEEE
Year
2012
Tongue
English
Weight
797 KB
Volume
59
Category
Article
ISSN
0018-9383

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As high-performance metal-insulator-metal capacitors are required for new technologies, an innovative architecture was developed with standard damascene processes used for copper interconnect realization. Low-cost damascene capacitors were 2 integrated with thin Si N films, leading to 2.9 fF / mm ca