High-Performance Lateral-Actuating Magnetic MEMS Switch
β Scribed by Glickman, M.; Tseng, P.; Harrison, J.; Niblock, T.; Goldberg, I.B.; Judy, J.W.
- Book ID
- 118237715
- Publisher
- IEEE
- Year
- 2011
- Tongue
- English
- Weight
- 928 KB
- Volume
- 20
- Category
- Article
- ISSN
- 1057-7157
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π SIMILAR VOLUMES
## Abstract In this work, a nonlinear model to predict actuation characteristics in lateral electrostaticallyβactuated DCβcontact MEMS switches is proposed. In this case a parallelβplate approximation cannot be applied. The model is based on the equilibrium equation for an elastic beam. It is demon
The magnetostatic radio frequency micro-electro-mechanical system switch is a special latching type of switch that possesses substantially high performance due to low loss, high linearity, and broad bandwidth. This new technology targets applications where high electrical performance and reliability