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Modeling, simulation and measurement of the dynamic performance of an ohmic contact, electrostatically actuated RF MEMS switch

✍ Scribed by Guo, Z J; McGruer, N E; Adams, G G

Book ID: 120268969
Publisher: Institute of Physics
Year: 2007
Tongue: English
Weight: 533 KB
Volume: 17
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/17/9/019

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