High-energy-resolution grazing emission X-ray fluorescence applied to the characterization of thin Al films on Si

✍ Scribed by Kayser, Y.; Szlachetko, J.; Banaś, D.; Cao, W.; Dousse, J.-Cl.; Hoszowska, J.; Kubala-Kukuś, A.; Pajek, M.

• Book ID: 120528677
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 758 KB
• Volume: 88
• Category: Article
• ISSN: 0584-8547
• DOI: 10.1016/j.sab.2013.06.011