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High energy implantation of 10B and 11B into (100) silicon in channel and in random direction

✍ Scribed by S. Bogen; L. Gong; L. Frey; H. Ryssel


Book ID
113284748
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
289 KB
Volume
80-81
Category
Article
ISSN
0168-583X

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