✦ LIBER ✦
Lateral spread of high energy P and B ions implanted in silicon along the [100] axis and in random direction
✍ Scribed by V. Privitera; V. Raineri; E. Rimini
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 252 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0167-9317
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