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High-Energy Electron Beam Lithography of Octadecylphosphonic Acid Monolayers on Aluminum

✍ Scribed by Gadegaard, Nikolaj; Chen, Xinyong; Rutten, Frank J. M.; Alexander, Morgan R.


Book ID
125520260
Publisher
American Chemical Society
Year
2008
Tongue
English
Weight
927 KB
Volume
24
Category
Article
ISSN
0743-7463

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Epitaxially grown calcium strontium fluoride on gallium arsenide has been patterned by high energy electron beam lithography and wet development. Fabrication of lines and dots of \(8 \mathrm{~nm}\) size is reported. Electron diffraction experiments indicate that fluorine is removed under electron bo