Nanostructuring of silicon by electron-b
Nanostructuring of silicon by electron-beam lithography of self-assembled hydroxybiphenyl monolayers
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KuΜller, A.; Eck, W.; Stadler, V.; Geyer, W.; GoΜlzhaΜuser, A.
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Article
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2003
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American Institute of Physics
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English
β 526 KB