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HF chemical etching of SiO2on 4H and 6H SiC

✍ Scribed by M. B. Johnson; M. E. Zvanut; Otha Richardson

Book ID: 107452433
Publisher: Springer US
Year: 2000
Tongue: English
Weight: 126 KB
Volume: 29
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-000-0079-3

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