Hardness and Young’s modulus of high-quality cubic boron nitride films grown by chemical vapor deposition

✍ Scribed by Jiang, X.; Philip, J.; Zhang, W. J.; Hess, P.; Matsumoto, S.

• Book ID: 121288907
• Publisher: American Institute of Physics
• Year: 2003
• Tongue: English
• Weight: 448 KB
• Volume: 93
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.1534625