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Thermal Stability of Cubic Boron Nitride Films Deposited by Chemical Vapor Deposition

โœ Scribed by Yu, J.; Zheng, Z.; Ong, H. C.; Wong, K. Y.; Matsumoto, S.; Lau, W. M.

Book ID
125986255
Publisher
American Chemical Society
Year
2006
Tongue
English
Weight
150 KB
Volume
110
Category
Article
ISSN
0022-3654

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Prepared Low Stress Cubic Boron Nitride
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โœ P.W. Zhu; Y.N. Zhao; B. Wang; Z. He; D.M. Li; G.T. Zou ๐Ÿ“‚ Article ๐Ÿ“… 2002 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 158 KB

We present low stress cubic boron nitride (cBN) films with a transition layer deposited on the metal alloy substrates by tuned substrate radio-frequency magnetron sputtering. The films were characterized by Fourier transform infrared spectroscopy and transmission electron microscopy (TEM). The IR pe