We present low stress cubic boron nitride (cBN) films with a transition layer deposited on the metal alloy substrates by tuned substrate radio-frequency magnetron sputtering. The films were characterized by Fourier transform infrared spectroscopy and transmission electron microscopy (TEM). The IR pe
Thermal Stability of Cubic Boron Nitride Films Deposited by Chemical Vapor Deposition.
โ Scribed by J. Yu; Z. Zheng; H. C. Ong; K. Y. Wong; S. Matsumoto; W. M. Lau
- Publisher
- John Wiley and Sons
- Year
- 2007
- Weight
- 12 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0931-7597
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