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H atom surface loss kinetics in pulsed inductively coupled plasmas

✍ Scribed by Jacq, S; Cardinaud, C; Le Brizoual, L; Granier, A

Book ID: 121444621
Publisher: Institute of Physics
Year: 2013
Tongue: English
Weight: 982 KB
Volume: 22
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/22/5/055004

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